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"Planar optical waveguide formation in LiNbO3 by means of high energy ion implantation"
F. Nesprías, M.E. Debray, M. Fischer, A. Lamagna, A.J. Kreiner, M. Davidson, J. Davidson, G. Redelico, A. Burlón, L. Murruni, D. Minsky and H. Somacal
Proc. of the "VI Latin American Symposium on Nuclear Physics and Applications" (SLAFNAP6), Puerto Iguazú, Misiones, Argentina, October 3-7, 2005. Ed. A.J. Kreiner, O. Civitarese, C. Dorso, G. García Bermúdez, A.J. Pacheco and N.N. Scoccola
AIP Conf. Proc., Vol.884 (2007) 489-491
Lithium niobate is a crystal with excellent physical properties for the fabrication of integrated optical devices: high electro-optic coefficients, low propagation loss and high Curie temperature. To achieve devices of high degree of optical integration, the formation of a wave guide of dimensions similar to the wavelength becomes indispensable. In the last years several procedures for production of LiNbO3 waveguides have been developed: by diffusion, ionic exchange and ionic implantation. The damage produced by the use of MeV ions near the surface material (where the electronic stopping power is dominant) can be strongly reduced by means of a suitable annealing conditioning. Near the end of the range of the incoming ions, the nuclear collisions are the most important process, producing a layer of damage of definite depth. Using the 20MV Pelletron Tandem accelerator at Tandar, implanted planar waveguides in LiNb03 were fabricated at room temperature. To avoid channeling effect the samples were tilted 7º off the beam direction.
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