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"Heavy Ion Micro-machining at the Tandar Laboratory"
M.E. Debray, M. Fischer, A.J. Kreiner, A. Lamagna, M. Davidson, J. Davidson, D. Minsky, A. Burlón and H. Somacal
Proc. of the "VI Latin American Symposium on Nuclear Physics and Applications" (SLAFNAP6), Puerto Iguazú, Misiones, Argentina, October 3-7, 2005. Ed. A.J. Kreiner, O. Civitarese, C. Dorso, G. García Bermúdez, A.J. Pacheco and N.N. Scoccola
AIP Conf. Proc., Vol.884 (2007) 499-500
The majority of the high energy ion beam micro-machining work has been carried out using MeV protons. This direct write-process was used to produce 3D structures in different type of materials. Since the micro-machining in PMMA depends on the breaking of polymeric chains (molecular links), the relevant parameter is the Ionization Energy [keV/µm]. Energy loss during most of the ion path on PMMA stems from the interaction with atomic electrons (near the Bragg peak energy loss due to nuclear interaction becomes more important) therefore the ion energy loss is primarily deposited in the PMMA material to break (positive photo-resist) atomic bonds. An increase of the mean ionization energy produces an increase of the breaking-up of the polymer chains, reducing the doses (ions/cm2) needed to modify the structure of the material.
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