During the last few years ERDA technique has been used to study material science problems. The important capability of ERDA methods is the quantitative elemental depth profiling of the near surface region of solids. There is no standard methodology for analyzing ERDA spectra and several MC codes have been developed to simulate them, although they are very costly in terms of computer time. Spectrum simulation is most certainly useful in many cases for predicting the shape of the spectrum that would result from a given experiment.